NanoImprint Lithography

Lithography & Patterning (Patterning, replication, and sample navigation)

NIL is a novel technique for the fabrication of nanostructures on large surfaces. The method is based on the excellent replication fidelity obtained with polymers. Once a solid stamp with a nanorelief on the surface is fabricated it can be used for the replication of many identical surface patterns. It therefore circumvents many limitations of conventional photolithography. Both thermal NIL into various thermoplastic materials and UV-assisted NIL, e.g. for the fabrication of stamp copies are available with sub-10 nm resolution. Imprint-based solutions can be used for a wide variety of applications and areas such as optics (refractive and diffractive elements, photonics, plasmonics, liquid crystals), biology (templates for cell growth, protein patterning, and crystallization), micro- and nanofluidics (for analysis of transport through lipid bilayers), surface wetting (via modification of hydrophilic and hydrophobic properties) etc.

 

                                                        

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          provided at NFFA-Europe laboratories by:
CNR-IOM (TS)
Italy
C2N-CNRS
France
CSIC-CNM
Spain
INL
Portugal
LUND + MAX IV
Sweden
PSI
Switzerland
EURONANOLAB
France
CNR-IOM (TS)
Italy
Automatic lab press
Thermal and UV-Nano Imprinting Lithography
Automatic lab presse Webber PW equipped with an external electro-hydraulic supply station Automatic lab UV press equipped together with an integrated pneumatic supply station
Max Press force: 35 kN Temperature range: 18-300°C Primary exposure wavelength: 254 nm
Samples: 6” plates
Vacuum imprint tool with integrated heater
The system is equipped with an external electro-hydraulic supply station. Press and supply station are connected with hydraulic tubes and quick lock components. Water cooling system.
Two-hand safety control panel, security protection device, rise of pressure adjustable, additional manometer, hand pump, pressure release valve, digital display PRESSTRONIC for force- and pressure-sensors for exact reading of the press force easier. Peak storage and a serial PC-interface
CSIC-CNM
Spain
NIL 4 inch system - Obducat (N4)
Thermal imprint with high resolution
Imprint by air to achieve high resolution and uniformity
Samples from 2mm x 2mm up to 4 inch
1-80bar pressure and up to 350ºC
Spinners and hot-plates for resist preparation
Resolution up to 20 nm with pattern transfer
Temperature and Pressure control and monitoring
PSI
Switzerland
Jenoptic HEX 03 hot press @ Laboratory for Micro and Nanotechnology
Thermal imprint and UV-assisted replication processes
Jenoptic HEX 03 hot press
Pressing force 200kN Embossing temperature up to 320°C
4" wafers and chips, normally 1x1 or 2x2 mm2
Embossing under vacuum
Spin-coater, wet-bench, hot-plates, microscope
Molding of thermoplastic polymers with resolution <10 nm
Flux measurement before exposures
Optical alignment with 3 μm overlay accuracy for double sided aligned embossing
CNR-IOM (TS)
Italy
UV-NIL press
UV-assisted nano imprinting lithography
uv light 254-365 nm
EURONANOLAB
France
NIL at EURONANOLAB - LAAS