Surface topography of hard or soft samples Acquisition in Tapping or Peak Force Tapping modes

Bruker Dimension Icon/Fast Scan

Optical microscope to visualize sample: 5 Mpixel digital camera; 180 µm to 1465 µm viewing area; digital zoom and motorized focus

spatial resolution < 10 nm Height resolution around 0.1 nm

Typical X-Y scan range of 90 µm by 90 µm, Z range of 10 µm (Z sensor noise level < 50 pm in closed-loop) Motorized position stage (X-Y axis) 180 mm × 150 mm (< 3 µm repeatability)

From a few mm2 to 200 mm wafer

Air or controlled atmosphere (AFM inside a glove box with N2 : level of O2 and H2O around ppm)

Surface potential mapping by Kelvin probe force microscopy (KPFM) Dopant mapping by scanning capacitance microscopy (SCM) or scanning spreading resistance microscopy (SSRM) Mechanical information by force curve analysis (Peak Force quantitative nanomechanics, Force volume, nano-indentation)

Heater-cooler (-30 to 200 °C)

Surface topography of samples Acquisition in non-contact mode

Omicron/ AFM VT-XA

Optical microscope to visualize sample: 5 Mpixel digital camera; manual zoom and focus

Spatial resolution < 10 nm Height resolution around 0.1 nm

Typical X-Y scan range of 8 µm by 8 µm, Z range of 3 µm Motorized position stage (X-Y axis) 10 mm × 10 mm

10 x 10 mm2 maximum

Ultra-High Vacuum (10-10 mbar)

Surface potential mapping by Kelvin probe force microscopy (KPFM) Surface photo-voltage measurement with visible sources (red, green and blue)

Analysis at variable temperature (50 to 500 K) Ar sputtering for surface cleaning Sample heating up to 1000K. LEED Auger spectroscopy Sample transfer through vessel or UHV suitcase

Topographic imaging of surfaces AFM contact and tapping mode, STM tunnelling spectroscopy, Lateral force mode

CP-II instrument from Digital Instruments

Optical microscope for laser and sample alignment

Sub-atomic resolution in x, y, z by piezo scanner

Large area scanner (90 µm) High resolution scanner (5 µm)

Sample size: 10 mm x 10 mm

Ambient room temperature and pressure

Surface topography of hard and soft samples, acquisition in tapping or contact mode, magnetic force microscopy

Keysight Technologies N9414A Series 5500 microscope

Optical microscope for laser and sample alignment

Spatial resolution < 10 nm Height resolution around 0.5 nm

X-Y scan range of max. 90 µm by 90 µm, Z range of 7 µm Noise level <5Å in XY, <0.5Å in Z

From a few mm2 to 20x20 mm2

Ambient pressure, room temperature

Surface topography

Tapping mode and PeakForce Tapping (PFT)

Angstrom resolution in vertical direction, nm resolution in in-plane, depends on cantilever

Solid sample, wafer up to 8" diameter or smaller pieces, max a few mm thick

Ambient

Optical system: 410-1845X magnification range, color video camera, motorized zoom system

No

AFM, LFM, MFM, PFM, TRM, PF-QNM, PF-Tuna:, TR-Tuna, SSRM

Bruker Dimension Icon Scanning Station

1Å x 1Å x 0.1Å

Max scan size 90 μm x 90 μm typical

Full 6" wafer, 180mm x 150mm inspectable area

Air/Liquid/Gas/Bad Vacuum

Z range 10 μm in imaging and force curve modes

Digital camera, digital zoom, motorized focus

Surface topography of hard and soft samples, by tapping and contact scanning modes

lateral resolution < 10 nm, height resolution around 1 nm

X-Y scan range of max. 50 µm by 50 µm, Z range of 3 µm

From a few mm2 to 20x20 mm2

Air

Digital camera, digital zoom

Measurement under ambient condition or with Nitrogen atmosphere, for specific applications measurements in liquid are available. Due to clean room location and very massive building, a extremely low noise level is attained to enable sub nm z resolution. Maximum size of a single scan is about 100 by 100µm. this is rarely done as this takes hours to do. Typical samples are a few mm small and mounted on a carrier to protect the sample and to ease handling. If you consider AFM as a suited technology be aware that the total height variation of your Region of Interest RoI must be less than 5µm including surface roughness, tilt and waviness.

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Detection is done via a mechanical lever made from Si or SiN. For micro indentation a steel cantilever is used. Typical size of a cantilever is a fraction of a human hair diameter. So its delicate but on the other hand very sensitive so that forces in the nN range can easily be detected.

Depending on the Cantilever tip radius, a lateral resolution of <1nm is attained. With cantilever of a suited geometry, the z resolution is in the range of 0,3nm depending on some parameters that have to be discussed

As mentioned the scan size is approximately 100 by 100µm. Typical scans are up to 20 by 20µm. With sufficient resolution to be superior to optical metrology, a point density of >10points per µm is required. to make full use, a point density of >100points per µm is desirable. That makes single measurements slow. Guess is something like 30 minutes per scan for medium resolution and >60 minutes for HR scans. Positioning is sub µm precise if suited markers are within the scan range.

Sample can be anything that is flat and at least semi rigid. Gels can be measured, grease with some limitations, and nano particle dust only if the particles adhere to the sample holder. At least if they are fixed. Samples with real 3D surfaces like parabolic mirrors or grids with lenses need to be checked for accessibility. We have some experience in how to mount samples. and for subsequent measurements we offer a carrier system to interchange samples.

We do not have a vacuum chamber. The lab provides ambient condition with humidity and temperature continuously monitored. We have a heater/cooler stage that allows to cool down to -25 °C and to heat up to 250°C with a nitrogen air flow to avoid oxidization or condensing water on the surface.

In addition to standard AFM modes, we offer PF-Tapping, PF-KPFM, modes for adhesion measurements and a specific setup to monitor the tip-sample interaction with an additional camera generating movies of the cantilever while in interaction with the surface. This is a valuable source of additional information especially for particle particle or particle fiber interaction analysis. As we have s automation Software installed, even long time measurements can be performed.

AFM measurements are supported by a confocal scanning microscope and a vertical scanning interferometer to generate a more realistic impression of the region of interest. Typically, only if these instruments show that the surface is homogeneous, then the AFM information gained from a very small scan is representing the sample at all.

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mesurements of topological features

Keysight 5100 AFM comprises a scanner of 60 x 60 microns in X / Y and 6 microns in the Z axis. The equipment can use a special liquid cell and controlled environment chamber for conducting scanners at low humidity or in nitrogen. The maximum sample size is 3x3 cm in X / Y and 2 cm thick. The equipment works in the Constant Amplitude Dynamic mode for obtaining topographic images, however Contact mode is also a possibility. The equipment uses an external generator module that can apply in-plane magnetic fields upto + -800 Oe. The equipment is specifically employed to acquired topographic images, having a low noise architecture that allow the acquisition of 500 nm size images.

x, y positioning

Keysight 5500, it has a 90x90 microns in X / Y and 15 microns in the Z axis closed loop scanner. The SPM is equipped with three independent Lock-in amplifiers that can be fully configured through the use of an external Signal Access Box. The equipment can be used with the following modes: Piezoresponse Force Microscopy, Bimodal Atomic Force Microscopy and Dynamic Topography. It also has aClosed Loop capability that significantly improves the positioning in X and Y. Sample size is limited to 3 x 3 cm in the X and Y directions and 1 cm in the Z direction. A Q-Control is also available to enhance images in liquid. It has a separate accessory for measuring humidity and temperature inside SPM box. A separate heater up to 350ºC can be used in this equipment.

Keysight 5500 LS, it has a 90x90 microns in X / Y and 15 microns in the Z axis closed loop scanner. The SPM is equipped with three independent Lock-in amplifiers that can be fully configured through the use of an external Signal Access Box. The equipment can be used with the following modes: Piezoresponse Force Microscopy, Electrostatic Force Microscopy, Kelvin Probe Force Microscopy, Scanning thermal Microscopy (from 2Q2016), Current Sensing Atomic Force Microscopy, PhotoConductive Atomic Force Microscopy, Bimodal Atomic Force Microscopy. It also has Closed Loop capability that significantly improves the positioning in X and Y as well as a motorized stage, with accuracy of + -3 microns, and a range of + -15cm in X / Y and 3cm in Z axis, so sample size may reach up to 25 x 25 cm and 3 cm thick. A Q-Control is also available to enhance images in liquid. It has a separate accessory for measuring humidity and temperature inside SPM box. A sample cooler and heater with a range of -60ºC to 90ºC and a separate heater up to 350ºC can be used in this equipment. A special current-to-voltage amplifier "Resiscope II" from CSI instruments can be used to acquire topography images. A separate accessory for illuminating samples in the Visible and UV spectra is also available. SPM3: Keysight 5500 AFM (aka Luke) Keysight 5500, it has a 90x90 microns in X / Y and 15 microns in the Z axis closed loop scanner. The SPM is equipped with three independent Lock-in amplifiers that can be fully configured through the use of an external Signal Access Box. The equipment can be used with the following modes: Piezoresponse Force Microscopy, Bimodal Atomic Force Microscopy and Dynamic Topography. It also has aClosed Loop capability that significantly improves the positioning in X and Y. Sample size is limited to 3 x 3 cm in the X and Y directions and 1 cm in the Z direction. A Q-Control is also available to enhance images in liquid. It has a separate accessory for measuring humidity and temperature inside SPM box. A separate heater up to 350ºC can be used in this equipment.

Statistical analysis of surface morphology of thin films and nanostructures; Metrology of nanometer-sized objects (proteins and nanoparticles); Nanotribological and nanomechanical characterization of (bio)interfaces; Force-spectroscopy; Scanning electric impedance microscopy; Calibration of AFM probes.

Statistical analysis of surface morphology of thin films and nanostructures; Metrology of nanometer-sized objects (proteins and nanoparticles); Nanotribological and nanomechanical characterization of (bio)interfaces; Force-spectroscopy; Scanning electric impedance microscopy; Calibration of AFM probes.