Lithography & Patterning techniques | NFFA.eu

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Lithography & Patterning techniques

Extreme Ultraviolet Interference Lithography

by: Yasin Ekinci, PSI

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Bottom-up: direct self-assembly of block copolymers

by: Steven Gottlieb and Marta Fernández-Regúlez, IMB-CNM

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Overview of Scanning Probe Lithography

by: Matteo Lorenzoni, Instituto de Microelectrónica de Barcelona

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Nanofabrication Techniques: Photolithography

by: Francesc Torres, Universitat Autònoma de Barcelona

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Nanofabrication Techniques: Electron Beam Lithography

by: Francesc Torres, Universitat Autònoma de Barcelona

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LITHOGRAPHY: Concepts and principles

by: Francesc Perez-Murano

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from: 1st NFFA-Europe Summer School

Nanolithography with X-rays

by: Yasin Ekinci (PSI)

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from: 1st NFFA-Europe Summer School

Nanostructures for use at Synchrotrons

by: Dr. Christian David (PSI)

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from: 1st NFFA-Europe Summer School

This research project has received funding from the EU's H2020 framework programme for research and innovation under grant agreements NFFA-Europe (n. 654360 from 1/9/2015 to 28/02/2021) and NFFA-Europe-Pilot (n. 101007417 from 1/03/2021 to 28/02/2026)

This work is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International License