The aerosol deposition process allows controllable size generation and deposition of aerosol particles of different metals, for example, Au, Ag, In, Pb, Pd, Cu and others. The size range of the aerosol particles is between 8 and 100 nm with very narrow size distribution. Aerosols can be randomly deposited on any substrate with densities up to 50 µm^-2. Two main methods are used to generate the aerosols: (1) thermal evaporation and condensation and (2) spark discharge. The aerosol particles of some materials, e.g. W or Fe, can be produced by a chemical reaction of decomposition of carbonyls of the corresponding metals.