30 May 2022
30 May 2022 - Virtual

Symposium: New trends in advanced lithography and pattern transfer methods

The symposium is organised by NFFA-Europe Pilot and will be held virtually on May 30 (h 13.00 – 17.00) and May 31 (h 9.00 – 13.00).

The main scope of the Symposium is to present and discuss the latest advances in ultra-high resolution lithography and methods of pattern transfer, that include advanced electron and ion beam patterning, methods of self-assembly, dry etching, deposition and other techniques.

The deadline for the abstract submissions is extended until January 31, 2022.

Updated information about the event can be found here:

Submit your abstracts here:

Event informations
30 May 2022
03 Jun 2022
NFFA-Europe Pilot