The main scope of the Symposium is to present and discuss the latest advances in ultra-high resolution lithography and methods of pattern transfer, that include advanced electron and ion beam patterning, methods of self-assembly, dry etching, deposition and other techniques.

The deadline for the abstract submissions is extended until January 31, 2022.

Updated information about the event can be found here:
https://www.european-mrs.com/new-trends-advanced-lithography-and-pattern-transfer-methods-emrs

Submit your abstracts here:
https://www.european-mrs.com/user/login?destination=extranet/new-abstract/2649/0