30 May 2022
30 May 2022

EMRS Spring Meeting 2022

NFFA Symposium - New trends in advanced lithography and pattern transfer methods

During the EMRS Spring Meeting 2022 the NFFA-Europe Pilot project has organized the one-day Symposium New Trends in Advanced Lithography and Pattern Transfer Methods on May 30-31, 2022. The Symposium attracted big attention of many EMRS attendees due to excellent 18 oral and 15 poster presentations that were selected by the program committee members Yasin Ekinci, PSI, Switzerland, Ivan Maximov, Lund University, Sweden, Francesc Perez-Murano, IMB-CNM, CSIC, Spain and Flavio Carsughi, FZJ, GermanyThe online Q&A sessions after every few talks allowed the Symposium participants to ask questions and participate in real-time discussions that contributed to the success of the NFFA-Symposium.

Presentations of high scientific value covered a wide range of lithographic and related techniques, such as EUV-lithography, scanning probe methods, DNA self-assembly, nanoimprint, resists, high-resolution patterning to show their state-of-the-art and future outlook.  

The number of the Symposium attendees reached 112 persons that is roughly the average number of participants of other parallel Symposia of the EMRS Spring Meeting 2022.

The Symposium organizers honoured the poster Investigation of interfacial widths and line-edge roughness in microphase separated cylindrical block copolymer thin films by Julius Bürger, Univ. Paderborn, Germany, with the best poster award for its scientific merits in the topic, goals and results.

The opportunities offered by the NFFA-Europe Pilot project to the European and worldwide scientists were presented in one of the talks; in particular, free access to state-of-the-art instrumentation was advertised for the benefit of the users.

The NFFA-Europe Pilot project is looking forward to the organization of the second workshop at a future EMRS Meeting.

Event informations
30 May 2022