Outcomes

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Publications view all
JINST, 12, P05024 (2017)
The hard X-ray Photon Single-Shot Spectrometer of SwissFEL—initial characterization
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SwissFEL requires the monitoring of the photon spectral distribution at a repetition rate of 100 Hz for machine optimization and experiment online diagnostics. The Photon Single Shot Spectrometer has been designed for the photon energy range of 4 keV to 12 keV provided by the Aramis beamline. It is capable of measuring the spectrum in a non-destructive manner, with an energy resolution of Δ E/E = (2–5) × 10−5 over a bandwidth of 0.5% on a shot-to-shot basis. This article gives a detailed description about the technical challenges, structures, and considerations when building such a device, and to further enhance the performance of the spectrometer.
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Nanotechnology 28, 175301 (2017)
Thermal scanning probe lithography for the directed self-assembly of block copolymers
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Thermal scanning probe lithography (t-SPL) is applied to the fabrication of chemical guiding patterns for directed self-assembly (DSA) of block copolymers (BCP). The two key steps of the overall process are the accurate patterning of a poly(phthalaldehyde) resist layer of only 3.5 nm thickness, and the subsequent oxygen-plasma functionalization of an underlying neutral poly(styrene-random-methyl methacrylate) brush layer. We demonstrate that this method allows one to obtain aligned line/space patterns of poly(styrene-block-methyl methacrylate) BCP of 18.5 and 11.7 nm half-pitch. Defect-free alignment has been demonstrated over areas of tens of square micrometres. The main advantages of t-SPL are the absence of proximity effects, which enables the realization of patterns with 10 nm resolution, and its compatibility with standard DSA methods. In the brush activation step by oxygen-plasma exposure, we observe swelling of the brush. This effect is discussed in terms of the chemical reactions occurring in the exposed areas. Our results show that t-SPL can be a suitable method for research activities in the field of DSA, in particular for low-pitch, high-χ BCP to achieve sub-10 nm line/space patterns.
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Proceedings SPIE 10143, 1-10 (2017)
Extreme ultraviolet patterning of tin-oxo cages
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We report on the extreme ultraviolet (EUV) patterning performance of tin-oxo cages: molecular building blocks that are known to turn insoluble upon EUV exposure, thus having the properties of a negative tone photoresist. In this work, we focus on contrast curves of the materials using open-frame EUV exposures and their patterning capabilities using EUV interference lithography. It is shown that baking steps, such as post-exposure baking (PEB) can significantly affect both the sensitivity and contrast in the open-frame experiments as well as the patterning experiments. In addition, we show that the exchange of the anions of the cage can make a difference in terms of their physical properties. Our results demonstrate the significance of process optimization while evaluating the resist performance of novel molecular materials.
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Deliverables view all
WP1 - Management
D1.3 - Setup and implementation of the TA and evaluation procedures
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NFFA-Europe offers to European and Third Country1 scientists from both academia and industry the possibility to carry out comprehensive projects for multidisciplinary research at the nanoscale. Activities are performed in six different types of Installations: - Lithography and nano-patterning (Litho) - Growth and synthesis (Growth) - Theory and Simulation (Theory) - Structural and Morphological nano-characterisation (SM Charact.) - Electronic and Chemical nano-characterisation (EC Charact.) - Magnetic, Optical and Electric nano-characterisation (ME Charact.) Each Installation includes laboratories located in different NFFA-EU sites; furthermore, when needed, limited2 access to co-located Large-Scale Facilities for Fine Analysis is offered as part of the access to Litho, or SM, EC or ME nano-characterisation. NFFA-Europe proposals necessarily include access to more than one type of Installation (e.g. Litho and Growth, Growth and Theory, SM Charact. and EC Charact., etc.) and cannot be limited to Fine Analysis only. Whenever possible access will be granted in a single NFFA-Europe site for all research steps. Access to more than one site for a given proposal will be considered only when technically or scientifically justified.
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WP1 - Management
D1.1 - Internal test of NFFA-Europe Website
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This deliverable describes the results achieved within task 1.5 “Communication”, and is also connected to the dissemination purposes of the project (WP11). The work done aimed at setting up the main information and functionalities of the website as a Single Entry Point (SEP) to find out about the project and access the offer of tools made available through NFFA-Europe research infrastructure.
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WP11 - Networking activities for NFFA user community impact and growth
D11.2 - Draft metadata standard for nanoscience data
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This document contains the NFFA Deliverable D11.2 “Draft metadata standard for nanoscience data” due in M6. It describes the approach, the relevant information management practices, standards and recommendations taken into account, as well as empirical research done by NFFA JRA3 for the purpose of metadata design, and then suggests a draft recommendation for NFFA metadata model. Having a common and well-defined metadata model is essential for human-to-human, human-to-machine and machine-to-machine interoperability in NFFA. Such a model will support the development of Information and Data management Repository Platform (IDRP) and will contribute to structured business analysis across the project. In return, the model will get further inputs from the continuing IT architecture design and business analysis. In addition to the NA activities, the deliverable has been discussed and validated through a number of conference calls and electronic communication in JRA3, as well as in the course of a dedicated face-to-face meeting in Abingdon, UK, in February 2016. The metadata model here proposed will be further validated, updated and detailed through the NFFA project activities within and beyond JRA3. It will be then finalised in D11.14 “Final metadata standard for nanoscience data” in M30. Approach
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