The cathodoluminescence tool is a SEM with a FEG source (2-10 keV) allowing spatial resolution as low as 3 nm. Luminescence spatial resolution from 10 nm to several hundreds of nanometers depending on electron beam energy and probed material. It can be used for analysis of material properties (charge carrier recombination, electronic transition) and detection of defects or impurities. Helium to room temperature luminescence characterization of solid samples using steady-state excitation (simultaneous mapping of cathodoluminescence, EBIC and SEM) and pulsed excitation (time-resolved cathodoluminescence). Time-resolved (available only at C2N-CNRS) is detected either with a Hamamatsu streak camera, or with a Time-Correlated Single Photon Counting (TCSPC) module equipped with a PM or an APD detector. Temporal resolution down to 10 ps.

The samples are mounted on a 1 inch sample holder attached on a piezoelectric nano-positioning cryostage allowing low temperature measurements (~10K). An intra-column optical collection system coupled with a dispersive spectrometer and two array detectors permits the spectral analysis of luminescence emission from 200 nm to 1.6 µm. This system offers a way to extract spatially resolved electronic and/or optical properties of luminescent material and devices.