31 Oct 2023The current deliverable D13.3 gives an overview of some important methods of pattern transfer in semiconductor nanofabrication where all 4 partners, LUND, EPFL, CSIC and C2N-CNRS are involved. The emphasis is put on atomic layer etching (ALE) that represent one of few approached in nanoprocessing that offer a potential of atomic layer control during removal of material. A related method of layer-by-layer epitaxial growth is added to give a more complete picture. Finaly, lithographic-based approaches of high-resolution patterning that do not yet provide atomic resolution are mentioned, too.
31 Oct 2023In the first 30 months of the NFFA-Europe Pilot project a lot of activities have been carried out in the field of communication and dissemination. They are listed and described in the detail in this document, and include the following ones: - an update of the Communication plan - the website and the social media have been updated regularly with news and information - website, social media and video analytics to prove their effectiveness - printed materials - dissemination events and academic dissemination - highlight proposals - scientific publications - worldwide network - training programme All the activities described here have the multiple effects to inform the scientific community on what the NFFA-Europe Pilot project can offer in terms of infrastructure and other opportunities and how to access them. The WP17 Board aims to identify those events that are strategically important for the awareness campaign as well as for the international networking. The pandemic biased the first part of the NFFA-Europe Pilot project, however the NFFA-Europe Pilot project was able to be on track thanks to the participation to virtual conferences.
9 Oct 2023The investigation of ultra-fast phenomena and metastable systems strongly interacting with their environment often requires dedicated instruments characterized by a low degree of interoperability. In this context, one of the objectives of JA1 is to extend the range of scanning probe microscopy (SPM) experiments to multiphase environments. Specifically, sub-task 11.1.1 is devoted to extend the real-time capabilities of SPM-based measurements in NFFA-Europe to realistic environments, in particular near-ambient pressures (NAP) conditions. To this purpose, a protocol to modify a commercial scanning tunneling microscopy (STM) setup to routinely perform NAP-STM experiments has been conceived. Instrumentation and hardware for the setup has been purchased, with particular focus on the critical technical issues (pumping stages, purification of the sample environment, high-pressure ultra-pure gases, materials for holders and STM tips). Practices and protocols to achieve this goal have been firstly designed and implemented at TUM on a dedicated system already intended for NAP measurements, with the aim to transfer the conceived approach to the commercial ultra-high vacuum (UHV) STM system located at CNR-IOM.