ICP
Inductively Coupled Plasma

Lithography & Patterning Installation 1
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A time varying axial magnetic field induces an electric field which keeps the electrons in a circular orbit and increases the probability to excite another molecule. This way the plasma density can be increased without having to increase the DC bias. RF biasing can be used independently to increase or decrease the energy of the ions impinging on the specimen surface. Inductively-coupled plasma reactive-ion etching (ICP-RIE) can achieve high etch rates by high ion or radical densities, while high material selectivity and low surface damage is achieved by using low ion energies. High density plasmas created by ICP systems can operate at low pressures and can yield significantly improved profile control for very deep, anisotropic etches.

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          provided at NFFA-Europe laboratories by:
Italy
Spain
Switzerland
PSI
Switzerland

Oxford plasmalab Systems 100 @ Laboratory for Micro and Nanotechnology

RIE-ICP system dedicated to the Bosch process (Au-free)

RIE-ICP system for general purpose etches (F-based)

Typical gases C4F8, CF4, SF6, O2, Ar

Up to 4" wafers

High Vacuum, LN2 cooled stage

RIE

Relevant clean room tools

Cl-based plasma etching tool dedicated to Cr etching

CNR-IOM
Italy

STS MESC MULTIPLEX ICP @ Facility of Nano Fabrication

High frequency Inductively Coupled Plasma etch system for deep Si etching

Several BOSCH like processes implemented allowing high aspect ratio structures

Continuous mode for nanostructure fabrication

Operation Gas: O2, N2, Ar, SF6, C4F8

The plasma is inductively coupled at 13.56 MHz via a matching unit and coil assembly

Down to the 10-nm scale in lateral resolution and aspect ratios of up to 10

Sample: up to 5” wafers can be loaded, but small samples can be processed as well

Independent energy control is provided by biasing of the electrode (platen) via automatic power control and impedance matching

CSIC
Spain

ICP-DRIE Alcatel AMS 110 DE

Inductively coupled plasma (ICP) deep reactive ion etching (DRIE) for etching a great variety of materials including silicon, germanium, SiC, III-V semiconductors, dielectrics and metals

Plasma excitation with ICP (13.56 MHz) and RF (13.56 MHz)

Gases available: SF6, O2, Ar, He, CH4 and C4F8

ICP power up to 3 kW and RF power up to 500 W

Bosch process aspect ratios up to 1:20

Si thickness etching from 50 nm to 500 mm

Up to 4 inch wafer size samples

Sample temperatures from -20ºC to 50ºC

CMOS contaminant metals (alkalines, noble metals) are allowed

Process chamber pressure 5 - 100 mTorr

Reactor chamber Temperature: 140ºC

Bosch process

Dielectric substrates etching capability (pyrex)

Optical microscope

Reflectometer for film thickness measurement

Confocal microscope

Profilometer

CSIC
Spain

ICP-DRIE Alcatel 601 E

Inductively coupled plasma (ICP) deep reactive ion etching (DRIE) for etching a great variety of materials including silicon, germanium, SiC, III-V semiconductors and dielectrics

Plasma excitation with ICP (13.56 MHz) and RF (13.56 MHz)

Gases available: SF6, O2, He and C4F8

ICP power up to 2 kW and RF power up to 500 W

Bosch process aspect ratios up to 1:20

Si thickness etching from 50 nm to 500 mm

Up to 4 inch wafer size samples

Sample temperatures from -170ºC to 50ºC

CMOS contaminant metals (alkalines, noble metals) NOT allowed

Process chamber pressure 5 - 100 mTorr

Reactor chamber Temperature: 140ºC

Bosch process

Optical microscope

Reflectometer for film thickness measurement

Confocal microscope

Profilometer

CSIC
Spain

ICP-DRIE Oxford S-100

Inductively coupled plasma (ICP) deep reactive ion etching (DRIE) with 2 chambers for etching Al or Al/Cu and SiC or photoresists

Plasma excitation with ICP (13.56 MHz) and RF (13.56 MHz)

Gases available: SF6, O2, Cl2, HBr, BCl3, N2 and He

ICP power up to 3 kW and RF power up to 600 W

Up to 4 inch wafer size samples

Sample temperatures from -20ºC to 50ºC

CMOS contaminant metals (alkalines, noble metals) NOT allowed

Chamber base pressure (vacuum): 10-6 Torr

Optical microscope

Reflectometer for film thickness measurement

Confocal microscope

Profilometer