Characterisation Installation 4
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The cathodoluminescence tool is a SEM with a FEG source (3-10 keV) allowing spatial resolution as low as 3 nm. Samples are mounted on a 1 inch sample holder attached on a piezoelectric nano-positioning cryostage allowing low temperature measurements (~10K). An intra-column optical collection system coupled with a dispersive spectrometer and two array detectors permits the spectral analysis of luminescence emission from 200 nm to 1.6 ┬Ám. This system offers a way to extract spatially resolved electronic and/or optical properties of luminescent material and devices.

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